A novel self-sensing technique for tapping-mode atomic force microscopy

Title: A novel self-sensing technique for tapping-mode atomic force microscopy
Creator: Ruppert, Michael G.; Moheimani, S. O. Reza
Relation: Review of Scientific Instruments Vol. 84, Issue 12
Publisher Link: http://dx.doi.org/10.1063/1.4841855
Publisher: American Institute of Physics
Resource Type: journal article
Date: 2013
Description: This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1 dB to approximately 35 dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for atomic force microscopy imaging.
Subject: atomic force microscopy; cantilevers; charge measurement; micromechanical devices; piezoelectric devices
Identifier: http://hdl.handle.net/1959.13/1051427
Identifier: uon:15286
Identifier: ISSN:0034-6748
Language: eng
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